Below you will find pages that utilize the taxonomy term “Bake” Polyimide bake infrared lamp On the litho floor, the polyimide bake is where thermal budget turns into line-width control. A few degrees of drift shows up as sidewall skew. A hot... Read more...
Polyimide bake infrared lamp On the litho floor, the polyimide bake is where thermal budget turns into line-width control. A few degrees of drift shows up as sidewall skew. A hot... Read more...