Ozone free infrared lamp

Fri, 26 Jun 2026 01:51:35 +0800

On the lithography floor, photoresist bake repeatability isn’t a nice-to-have—it’s the process. A 2°C drift during soft bake or hard bake will move your critical dimension control, and one particle event can wipe out an entire lot. We built our ozone-free infrared lamps to take those variables off the table. What matters, technically These lamps run on near-infrared (NIR) with ozone-free operation, so you can ditch the catalytic converter and the maintenance headache that comes with it. Across the illuminated field, wafer-plane thermal uniformity holds at ±0.1°C, and run-to-run repeatability stays within ±0.2°C. The system is built for cleanroom Class 1–100: low-outgassing materials, sealed optical paths, and an airflow approach that keeps particles away from the wafer. Output stability is <1% drift over 5,000+ hours—meaning it keeps up with 24/7 fab schedules without needing constant recalibration. Why it holds up in production Photoresist processing lives and dies on thermal history. Our IR lamps heat the wafer directly and fast, with tight closed-loop control that keeps the thermal budget consistent from lot to lot. You end up with tighter CD uniformity, fewer reworks, and yield you can plan around. Because the lamp hits setpoint quickly and holds it without overshoot, energy use drops. The long service interval also cuts down on spare inventory and maintenance labor. On advanced nodes, the combo of zero ozone, low particle generation, and precise temperature control protects the wafer—and it protects the tool environment. What you need to plan for These lamps integrate with standard semiconductor equipment interfaces, but the thermal load path matters. Installation has to account for the tool’s heat dissipation and airflow routing—if the cooling design isn’t right, long-term stability will suffer. Run a short commissioning pass to confirm setpoint mapping against your resist stack and the stage motion profile. Once you nail that alignment, the process window opens up—and it stays predictable.

Free on Modern Infrared Home Heating

Ozone free infrared lamp